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2004, ISBN 0815514832, xiv, 518
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is... 
Cathode sputtering (Plating process) | Energy Technology & Engineering | Thin films
Book
Surface & Coatings Technology, ISSN 0257-8972, 11/2019, Volume 377, p. 124906
In current study unconventional method of TiO film deposition by co-sputtering from two symmetrically placed inclined pulsed-DC and RF powered magnetrons has... 
Co-sputtering | Pulsed-DC sputtering | RF sputtering | Magnetron sputtering | Orientation control | TiO2
Journal Article
2016, Springer Theses. Recognizing Outstanding Ph.D. Research, ISBN 3662494043
Web Resource
Journal of Applied Physics, ISSN 0021-8979, 05/2017, Volume 121, Issue 17
Journal Article
Journal of Physics Condensed Matter, ISSN 0953-8984, 06/2018, Volume 30, Issue 27, p. 274004
Nanopatterning at solid surfaces by ion beam sputtering (IBS) has been practiced mostly for stationary substrates with an ion beam incident under a fixed... 
ion beam | dual ion beam sputtering | swing during ion beam sputtering | nanopatterning | sequential ion beam sputtering | rocking during ion beam sputtering | sputtering | PHYSICS, CONDENSED MATTER | MECHANISM | NANOSTRUCTURES | PATTERN-FORMATION | EVOLUTION | SURFACE
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 12/2019, Volume 52, Issue 49, p. 495201
Target poisoning in reactive sputtering is one of the biggest problems in the coatings industry. In this work, we use the co-sputtering simulation reactive... 
TARGET | PHYSICS, APPLIED | DEPOSITION | Co sputtering simulation | plasma emission spectroscopy | SiO2 sputtering yield | reactive magnetron sputtering
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, 05/2019
Journal Article
Scientia et Technica, ISSN 0122-1701, 2011, Volume 2, Issue 48, pp. 218 - 223
Journal Article
11/2010, Topics in Applied Physics Ser., ISBN 9783642079443, Volume 110
Annotation This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an... 
Sputtering (Physics) | Science
Web Resource
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