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1. Full Text Catalyst Design with Atomic Layer Deposition
by O’Neill, Brandon J and Jackson, David H. K and Lee, Jechan and Canlas, Christian and Stair, Peter C and Marshall, Christopher L and Elam, Jeffrey W and Kuech, Thomas F and Dumesic, James A and Huber, George W and Argonne National Lab. (ANL), Argonne, IL (United States)
ACS Catalysis, ISSN 2155-5435, 03/2015, Volume 5, Issue 3, pp. 1804 - 1825
Atomic layer deposition (ALD) has emerged as an interesting tool for the atomically precise design and synthesis of catalytic materials. Herein, we discuss... 
catalyst overcoating | mechanism elucidation | atomic layer deposition | ALD | bimetallic nanoparticles | metal nanoparticles | catalyst design | controlled synthesis | VANADIUM-OXIDE | CHEMISTRY, PHYSICAL | QUARTZ-CRYSTAL MICROBALANCE | FLUIDIZED-BED REACTOR | SUPPORTED METAL NANOPARTICLES | OXIDE THIN-FILMS | PLATINUM NANOPARTICLES | OXIDATIVE DEHYDROGENATION | MESOPOROUS SILICA | TITANIUM-DIOXIDE | SURFACE-CHEMISTRY | INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
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2. Full Text Particle atomic layer deposition
by Weimer, Alan W
Journal of Nanoparticle Research, ISSN 1388-0764, 1/2019, Volume 21, Issue 1, pp. 1 - 42
The functionalization of fine primary particles by atomic layer deposition (particle ALD) provides for nearly perfect nanothick films to be deposited... 
Materials Science | Atomic layer deposition | Physical Chemistry | Nanoparticle | Optics, Lasers, Photonics, Optical Devices | Nanolayers | Characterization and Evaluation of Materials | Inorganic Chemistry | Coating | Nanotechnology | Particle ALD | THIN-FILMS | MULTIPLE EXCITON GENERATION | LARGE QUANTITIES | MATERIALS SCIENCE, MULTIDISCIPLINARY | ELECTRICAL-PROPERTIES | SURFACE MODIFICATION | NANOSCIENCE & NANOTECHNOLOGY | FLUIDIZED-BED REACTOR | POLYMER-FILMS | CHEMISTRY, MULTIDISCIPLINARY | CARBON NANOTUBES | VAPOR-DEPOSITION | ZIRCONIA NANOPARTICLES | Nanoparticles | Films | Surface reactions | Nanotubes | Nuclear reactors | Film thickness | Deposition | Review
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3. Full Text Atomic layer deposition of ZnO: A review
by Tynell, Tommi and Karppinen, Maarit
Semiconductor Science and Technology, ISSN 0268-1242, 2014, Volume 29, Issue 4, p. 43001
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more and more interest in the last 20 years as a potential material for... 
thin film | ZnO | atomic layer deposition | PHYSICS, CONDENSED MATTER | CORE-SHELL NANOFIBERS | ULTRAHIGH-ASPECT-RATIO | MATERIALS SCIENCE, MULTIDISCIPLINARY | ALUMINA SPINEL FORMATION | FLUIDIZED-BED REACTOR | AL-DOPED ZNO | ENGINEERING, ELECTRICAL & ELECTRONIC | LIGHT-EMITTING-DIODES | OXIDE THIN-FILMS | PULSED-LASER DEPOSITION | FILM SOLAR-CELLS | GAS-SENSING PROPERTIES
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4. Full Text Perovskite Thin Films via Atomic Layer Deposition
by Sutherland, Brandon R and Hoogland, Sjoerd and Adachi, Michael M and Kanjanaboos, Pongsakorn and Wong, Chris T. O and McDowell, Jeffrey J and Xu, Jixian and Voznyy, Oleksandr and Ning, Zhijun and Houtepen, Arjan J and Sargent, Edward H
Advanced Materials, ISSN 0935-9648, 01/2015, Volume 27, Issue 1, pp. 53 - 58
A new method to deposit perovskite thin films that benefit from the thickness control and conformality of atomic layer deposition (ALD) is detailed. A seed... 
perovskites | optical gain | atomic layer deposition | transient absorption | Perovskites | Atomic layer deposition | Transient absorption | Optical gain | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | SOLAR-CELLS | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | LENGTHS | NANOSCIENCE & NANOTECHNOLOGY | EFFICIENT | CHEMISTRY, MULTIDISCIPLINARY | Thin films | Perovskite | Dielectric films | Deposits | Seeds | Optical properties | Gain | Deposition
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5. Full Text Next-Generation Lithium Metal Anode Engineering via Atomic Layer Deposition
by Kozen, Alexander C and Lin, Chuan-Fu and Pearse, Alexander J and Schroeder, Marshall A and Han, Xiaogang and Hu, Liangbing and Lee, Sang-Bok and Rubloff, Gary W and Noked, Malachi
ACS Nano, ISSN 1936-0851, 06/2015, Volume 9, Issue 6, pp. 5884 - 5892
Lithium metal is considered to be the most promising anode for next-generation batteries due to its high energy density of 3840 mAh g(-1). However, the extreme... 
lithium protection | solid electrolyte interface | lithium metal anode | atomic layer deposition | lithium-sulfur | ION BATTERIES | PROTECTION | PERFORMANCE | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | NANOSCIENCE & NANOTECHNOLOGY | MECHANISMS | CHEMISTRY, MULTIDISCIPLINARY | CATHODE | SULFUR BATTERY | COATINGS | AL2O3 | THIN-FILM
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6. Full Text Atomic Layer Deposition of Metal Sulfide Materials
by Dasgupta, Neil P and Meng, Xiangbo and Elam, Jeffrey W and Martinson, Alex B. F and Argonne National Lab. (ANL), Argonne, IL (United States)
Accounts of Chemical Research, ISSN 0001-4842, 02/2015, Volume 48, Issue 2, pp. 341 - 348
The field of nanoscience is delivering increasingly intricate yet elegant geometric structures incorporating an ever-expanding palette of materials. Atomic... 
EPITAXY | CELLS | NANOCOMPOSITES | GROWTH | LITHIUM-SULFUR BATTERIES | HYDROGEN-SULFIDE | CHEMISTRY, MULTIDISCIPLINARY | IN-SITU | SOLAR-ENERGY CONVERSION | MONOSULFIDE THIN-FILMS | QUANTUM DOTS | Atomic properties | Sulfides | Chemical properties | synthesis (novel materials) | materials and chemistry by design | NANOSCIENCE AND NANOTECHNOLOGY | ENERGY STORAGE | INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY | energy storage (including batteries and capacitors) | charge transport
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7. Full Text Atomic Layer Deposition of Rhenium Disulfide
by Hämäläinen, Jani and Mattinen, Miika and Mizohata, Kenichiro and Meinander, Kristoffer and Vehkamäki, Marko and Räisänen, Jyrki and Ritala, Mikko and Leskelä, Markku
Advanced Materials, ISSN 0935-9648, 06/2018, Volume 30, Issue 24, pp. e1703622 - n/a
2D materials research is advancing rapidly as various new “beyond graphene” materials are fabricated, their properties studied, and materials tested in various... 
ALD | rhenium sulfide | atomic layer deposition | ReS2 | transition metal dichalcogenides | ReS | LARGE-AREA | PHYSICS, CONDENSED MATTER | RES2 NANOSHEETS | PHYSICS, APPLIED | CHEMICAL-VAPOR-DEPOSITION | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | NANOSCIENCE & NANOTECHNOLOGY | CHEMISTRY, MULTIDISCIPLINARY | FIELD-EFFECT TRANSISTORS | TRANSITION-METAL DICHALCOGENIDES | PHOTODETECTORS | GROWTH | 2-METHOXYPHENOL | CRYSTALS | CATALYSTS | Thin films | Atomic force microscopy | Transition metal compounds | Anisotropy | Analysis | X-ray spectroscopy | Dielectric films | Scanning electron microscopy | Atomic beam spectroscopy | Recoil | Field emission microscopy | Substrates | Film growth | Properties (attributes) | Decoupling | Transmission electron microscopy | Atomic layer deposition | Microscopy | Spectrum analysis | Monolayers | Rhenium | Atomic structure | Elastic analysis | Energy dispersive X ray spectroscopy
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8. Full Text Atomic and molecular layer deposition: off the beaten track
by Van Bui, H and Grillo, F and van Ommen, J. R
Chemical communications (Cambridge, England), ISSN 1359-7345, 12/2016, Volume 53, Issue 1, pp. 45 - 71
Atomic layer deposition (ALD) is a gas-phase deposition technique that, by relying on self-terminating surface chemistry, enables the control of the amount of... 
Nitrides | Synthesis (chemistry) | Atomic layer deposition | Reactors | Semiconductors | Surface chemistry | Substrates | Deposition
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9. Full Text Recent progress of atomic layer deposition on polymeric materials
by Guo, Hong Chen and Ye, Enyi and Li, Zibiao and Han, Ming-Yong and Loh, Xian Jun
Materials Science & Engineering C, ISSN 0928-4931, 01/2017, Volume 70, Issue Pt 2, pp. 1182 - 1191
As a very promising surface coating technology, atomic layer deposition (ALD) can be used to modify the surfaces of polymeric materials for improving their... 
Thin films | Inorganic/polymer interfaces | Polymeric materials | Atomic layer deposition | Surface chemistry | GAS-DIFFUSION BARRIERS | MATERIALS SCIENCE, BIOMATERIALS | ALUMINUM-OXIDE | LOW-TEMPERATURE | AL2O3 FILMS | GROWTH | SURFACE | COATINGS | THERMAL TRANSFORMATIONS | THIN-FILM ENCAPSULATION | CHROMIUM ACETYLACETONATE | Materials Testing - methods | Models, Theoretical | Polymers - chemistry | Electricity | Surface Properties | Polymers
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10. Full Text Atomic Layer Deposition of Noble Metals and Their Oxides
by Hämäläinen, Jani and Ritala, Mikko and Leskelä, Markku
Chemistry of Materials, ISSN 0897-4756, 01/2014, Volume 26, Issue 1, pp. 786 - 801
Atomic layer deposition (ALD) is an attractive method to deposit thin films for advanced technological applications such as microelectronics and... 
iridium | ruthenium | platinum | atomic layer deposition | noble metal oxide | ALD | osmium | palladium | thin film | noble metal | rhodium | DEHYDROGENATION REACTIONS | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | PLATINUM OXIDE | CARBON NANOTUBES | REACTION-MECHANISM | REMOTE PLASMA | GROWTH | NUCLEATION | RU THIN-FILMS | IN-SITU
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11. Full Text Atomic layer deposition for biosensing applications
by Graniel, Octavio and Weber, Matthieu and Balme, Sébastien and Miele, Philippe and Bechelany, Mikhael
Biosensors and Bioelectronics, ISSN 0956-5663, 12/2018, Volume 122, pp. 147 - 159
Atomic layer deposition (ALD) is a thin film deposition technique currently used in various nanofabrication processes for microelectronic applications. The... 
Atomic layer deposition | Nanofabrication | Biosensor | ZNO NANOSTRUCTURES | ELECTROCHEMISTRY | FIELD-EFFECT TRANSISTOR | CHEMISTRY, ANALYTICAL | SOLAR-CELLS | CHEMICAL-VAPOR-DEPOSITION | GATE DIELECTRICS | NANOSCIENCE & NANOTECHNOLOGY | SOLID-STATE NANOPORES | LABEL-FREE | BIOPHYSICS | OXIDE THIN-FILMS | BIOTECHNOLOGY & APPLIED MICROBIOLOGY | ELECTRICAL DETECTION | LITHIUM-ION BATTERIES | Nanostructures - ultrastructure | Animals | Nanotechnology - methods | Humans | Surface Properties | Nanostructures - chemistry | Nanotechnology - instrumentation | Biosensing Techniques - instrumentation | Biosensing Techniques - methods | Equipment Design | Thin films | Medical equipment | Usage | Dielectric films | Physiological apparatus | Detectors | Chemical Sciences
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12. Full Text Atomic Layer Deposition of Tin Monosulfide Thin Films
by Sinsermsuksakul, Prasert and Heo, Jaeyeong and Noh, Wontae and Hock, Adam S and Gordon, Roy G
Advanced Energy Materials, ISSN 1614-6832, 11/2011, Volume 1, Issue 6, pp. 1116 - 1125
Thin film solar cells made from earth‐abundant, non‐toxic materials are needed to replace the current technology that uses Cu(In,Ga)(S,Se)2 and CdTe, which... 
photovoltaic materials | atomic layer deposition | electro‐optical materials | thin films | PHYSICAL-PROPERTIES | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | CHEMICAL-VAPOR-DEPOSITION | ENERGY & FUELS | MATERIALS SCIENCE, MULTIDISCIPLINARY | ZINC BLENDE | SPRAY-PYROLYSIS | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | SNS FILMS | SULFIDE FILMS | electro-optical materials | SPECTRA | ELECTRODEPOSITION | PRECURSORS | Solar cells | Hydrogen sulfide | Thin films | Photovoltaic cells | Cadmium tellurides | Tin | Carrier density | Deposition
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13. Full Text Atomic-Layer-Deposition Oxide Nanoglue for Sodium Ion Batteries
by Han, Xiaogang and Liu, Yang and Jia, Zheng and Chen, Yu-Chen and Wan, Jiayu and Weadock, Nicholas and Gaskell, Karen J and Li, Teng and Hu, Liangbing and Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)
Nano Letters, ISSN 1530-6984, 01/2014, Volume 14, Issue 1, pp. 139 - 147
Atomic-layer-deposition (ALD) coatings have been increasingly used to improve battery performance. However, the electrochemical and mechanistic roles remain... 
Nanoglue | atomic-layer-deposition | ionic conductivity | Na-ion battery anode | tin anode | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | ELECTRON-MICROSCOPY OBSERVATION | MATERIALS SCIENCE, MULTIDISCIPLINARY | SILICON | CHEMISTRY, PHYSICAL | NANOSCIENCE & NANOTECHNOLOGY | ANODES | CHEMISTRY, MULTIDISCIPLINARY | Al2O3 | EVOLUTION | TIN | ENERGY-STORAGE | SNO2 NANOWIRE | MICROSTRUCTURE | ELECTROCHEMICAL LITHIATION | Charging | Tin | Performance enhancement | Nanostructure | Electric batteries | Coatings | Anodes | Discharge | bio-inspired, energy storage (including batteries and capacitors), defects, charge transport, synthesis (novel materials), synthesis (self-assembly), synthesis (scalable processing)
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