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Computer Physics Communications, ISSN 0010-4655, 09/2016, Volume 206, pp. 35 - 44
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 02/2018, Volume 27, Issue 2, p. 25009
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 11/2017, Volume 122, Issue 19, p. 193302
We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the charged particle densities, the electronegativity,... 
PHYSICS, APPLIED | EXCITED DISCHARGE | PLASMA IONIZATION | FREQUENCY | ACTINOMETRY | COLLISIONS | RADIOFREQUENCY DISCHARGES | MOLECULES | Monte Carlo method | Usage | Research | Electrons | Physics - Plasma Physics | Fysik | Physical Sciences | particle-in-cell | Naturvetenskap | Capacitively coupled discharges | Natural Sciences | Physics
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 2014, Volume 23, Issue 2, pp. 25015 - 22
Journal Article
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, ISSN 1672-7126, 05/2015, Volume 35, Issue 5, pp. 565 - 569
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 07/2016, Volume 25, Issue 5, p. 55002
The effects of including the singlet metastable molecule O2(b) in the discharge model of a capacitively coupled rf driven oxygen discharge are explored. We... 
metastable states | particle-in-cell Monte Carlo collision method | oxygen discharge | capacitively coupled discharge | secondary electron emission | Fusion, Plasma and Space Physics | Fysik | Physical Sciences | Naturvetenskap | Elektro- och systemteknik | Fusion, plasma och rymdfysik | Natural Sciences | Electrical Engineering
Journal Article
等离子体科学与技术:英文版, ISSN 1009-0630, 2014, Volume 16, Issue 4, pp. 352 - 355
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 02/2014, Volume 23, Issue 1, pp. 15016 - 11
By re-evaluating the hard-wall collisionless electron heating model from first principles, we show that despite previous criticisms (Gozadinos et al 2001 Phys.... 
electron heating | collisionless heating | hard-wall model | capacitively coupled plasmas | PHYSICS, FLUIDS & PLASMAS | RADIOFREQUENCY | SIMULATIONS | Equivalence | Sheaths | Compressing | Heating | Oscillating | Joining | Mathematical models | Electron distribution | Plasma Physics | Physics
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 09/2018, Volume 350, pp. 740 - 744
A plasma enhanced atomic layer deposition (PEALD) process combined with ion energy control of capacitively couples radio frequency (CCRF) discharges in Ar/H... 
Titanium metal | PEALD | Ion energy | Capacitively coupled discharge
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 02/2015, Volume 24, Issue 1, pp. 15003 - 12
Journal Article
Journal of Physics D, ISSN 0022-3727, 2017, Volume 50, Issue 17
We apply particle-in-cell simulations with Monte Carlo collisions to study the influence of the singlet metastable states on the ion energy distribution in... 
Fysik | Physical Sciences | Naturvetenskap | Elektro- och systemteknik | Natural Sciences | capacitively coupled discharge | Electrical Engineering
Journal Article
SURFACE & COATINGS TECHNOLOGY, ISSN 0257-8972, 09/2018, Volume 350, pp. 740 - 744
A plasma enhanced atomic layer deposition (PEALD) process combined with ion energy control of capacitively couples radio frequency (CCRF) discharges in Ar/H-2... 
THIN-FILMS | PHYSICS, APPLIED | PEALD | DEPOSITION | Capacitively coupled discharge | GROWTH | Titanium metal | STRESS | Ion energy | MATERIALS SCIENCE, COATINGS & FILMS | SIO2
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 06/2019, Volume 52, Issue 24, p. 245202
Using a collisional radiative model coupled with optical emission spectroscopy (OES) of helium n = 3 levels, the electron temperature (T-e) of an... 
atmospheric pressure plasma | PHYSICS, APPLIED | low-temperature plasma | capacitively-coupled discharge | electron temperature | dielectric barrier discharge | electron density | GLOW
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 08/2017, Volume 50, Issue 33
The behaviour of absolute electron density and density of F-, O- and CF3- is studied in asymmetric capacitively coupled plasma discharge produced in an... 
ELECTRON | PHYSICS, APPLIED | hairpin probe | capacitively coupled plasma | CHEMISTRY | laser photodetachment | PHOTODETACHMENT | DRIVEN | NEGATIVE-ION DENSITIES | very high frequency | FLUOROCARBON
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 08/2017, Volume 50, Issue 33
The behaviour of absolute electron density and density of F-, O- and CF3- is studied in asymmetric capacitively coupled plasma discharge produced in an... 
ELECTRON | PHYSICS, APPLIED | hairpin probe | capacitively coupled plasma | FREQUENCY | CHEMISTRY | laser photodetachment | PHOTODETACHMENT | DRIVEN | NEGATIVE-ION DENSITIES | very high frequency | FLUOROCARBON
Journal Article
PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN 0963-0252, 10/2016, Volume 25, Issue 5
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 10/2019, Volume 52, Issue 44, p. 445201
In many cases, the capacitance of a plasma discharge is determined by the sheath capacitance, and therefore controlling the sheath thickness can result in a... 
radio frequency | PHYSICS, APPLIED | sheath | PLASMA | capacitively coupled plasma | variable capacitor | IMPEDANCE | plasma impedance | sheath thickness | SCALING LAWS | VERIFICATION
Journal Article
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