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Plasma Sources Science and Technology, ISSN 0963-0252, 04/2018, Volume 27, Issue 4
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 11/2019, Volume 377
The surface modification of a boron nitride (BN) film by plasma exposure was investigated by means of nanoindentation analyses and molecular dynamics... 
Boron nitride | Plasma | Molecular dynamics simulation | Hardness | Damage | Ion energy
Journal Article
Physical Review Letters, ISSN 0031-9007, 03/2015, Volume 114, Issue 12, pp. 125002 - 125002
The ionization dynamics in geometrically symmetric parallel plate capacitively coupled plasmas driven by radio frequency tailored voltage waveforms is... 
PHYSICS, MULTIDISCIPLINARY | ION ENERGY | ELECTRONS | DISCHARGES | Electrodes | Electric potential | Asymmetry | Ionization | Dynamics | Voltage | Waveforms | Symmetry | Plasma Physics | Physics
Journal Article
11/2013
Plasma enhanced chemical vapor deposition systems are massively deployed to grow numerous thin film coatings including hydrogenated amorphous silicon. A new... 
radio frequency | amorphous silicon | silane | ion energy distribution | plasma | 0759 | glow discharge | Direct Current Saddle Field | mass spectrometer
Dissertation
Physical Review Letters, ISSN 0031-9007, 04/2008, Volume 100, Issue 17, pp. 176101 - 176101
We demonstrate that when, and only when, the biaxial stress is increased above a critical value of 6 +/- 1 GPa during the growth of a carbon film at room... 
DIAMOND-LIKE CARBON | TEMPERATURE | PHYSICS, MULTIDISCIPLINARY | ION ENERGY
Journal Article
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 08/2019, Volume 52, Issue 35, p. 355205
A nearly monoenergetic Ar+ ion beam (100 eV peak energy, 3.5 eV full width at half maximum), with self-neutralized space charge, was extracted from a power... 
ENERGY | PHYSICS, APPLIED | ion energy distribution | ion beam etching | space charge neutralization
Journal Article
Surface and Coatings Technology, ISSN 0257-8972, 05/2019, Volume 365, pp. 58 - 64
Titanium nitride films deposited by conventional magnetron sputtering are prone to contamination, especially residual gas species, and the composition and... 
Oxygen concentration | Magnetron sputtering | Anode layer ion source | Resistivity | Titanium nitride | Ion flux density | Ion energy
Journal Article
Applied Energy, ISSN 0306-2619, 10/2019, Volume 251, p. 113179
Electrical energy storage (EES) such as lithium-ion (Li-ion) batteries can reduce curtailment of renewables, maximizing renewable utilization by storing... 
Financial model | Lithium-ion energy storage | Financing | Solar PV | Storage degradation
Journal Article
Thin Solid Films, ISSN 0040-6090, 08/2015, Volume 589, pp. 783 - 791
Titanium dioxide films were deposited on silicon substrates from oxygen/titanium tetraisopropoxide inductively coupled radiofrequency plasmas in a helicon... 
Plasma enhanced chemical vapour deposition | Ion energy | Titanium dioxide | Ellipsometry | Condensed Matter | Materials Science | Physics
Journal Article
Plasma Sources Science and Technology, ISSN 0963-0252, 02/2011, Volume 20, Issue 1, p. 015017
The electrical asymmetry effect (EAE) in geometrically symmetric capacitively coupled radio frequency discharges operated at multiple consecutive harmonics is... 
CATHODE | FUNCTIONAL SEPARATION | DYNAMICS | ION ENERGY-DISTRIBUTION | PHYSICS, FLUIDS & PLASMAS
Journal Article
中国物理快报:英文版, ISSN 0256-307X, 2017, Volume 34, Issue 11, pp. 119 - 122
A heavy-ion irradiation experiment is studied in digital storage cells with different design approaches in 130?nm CMOS bulk Si and silicon-on-insulator (SOI)... 
RATE PREDICTION | IMPACT | UPSET | PHYSICS, MULTIDISCIPLINARY | ION ENERGY
Journal Article
Physics of Plasmas, ISSN 1070-664X, 06/2017, Volume 24, Issue 6, p. 63518
In this paper, the design of a new cylindrical Hall thruster (CHT) is presented. Its anode is separated from the gas distributor, which is made of ceramic. The... 
PHYSICS, FLUIDS & PLASMAS | Ion currents | Ions | Ionization | Anode effect | Ion energy distribution | Distribution functions
Journal Article
Plasma Processes and Polymers, ISSN 1612-8850, 09/2019, Volume 16, Issue 9, p. n/a
With ever increasing demands on device patterning to achieve smaller critical dimensions, the need for precise, controllable atomic layer etching (ALE) is... 
self‐limiting process | ion energy distribution | aspect ratio independent etching | atomic layer etching | plasma etching
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 09/2018, Volume 350, pp. 740 - 744
A plasma enhanced atomic layer deposition (PEALD) process combined with ion energy control of capacitively couples radio frequency (CCRF) discharges in Ar/H... 
Titanium metal | PEALD | Ion energy | Capacitively coupled discharge
Journal Article
PLASMA PHYSICS AND CONTROLLED FUSION, ISSN 0741-3335, 08/2019, Volume 61, Issue 8, p. 85031
Metallic mirrors are to be used extensively within ITER for diagnostics and real time control. Erosion of the first wall within ITER will cause particles to be... 
beryllium oxide | fusion optics | ENERGY | etching | PHYSICS, FLUIDS & PLASMAS | DEPOSITION | JET | hybrid simulation | ion energy distribution function | MIRRORS | DEPENDENCE
Journal Article
Radiation Effects and Defects in Solids, ISSN 1042-0150, 04/2018, Volume 173, Issue 3-4, p. 283
Implanted Au 5 + -ion-induced modification in structural and phonon properties of phase pure BiFeO 3 (BFO) ceramics prepared by sol-gel method was... 
ceramics | Raman studies | ion implantation | synergistic ion energy | BiFeO | XRD
Journal Article
Applied Surface Science, ISSN 0169-4332, 05/2012, Volume 258, Issue 15, pp. 5659 - 5665
TiO films are deposited by direct current reactive magnetron sputtering with radio frequency substrate bias. Plasma ions are accelerated towards the substrate... 
Substrate bias | Optical dispersion | Rutile TiO | Reactive sputtering | Ion energy
Journal Article
Physical Review Letters, ISSN 0031-9007, 10/2013, Volume 111, Issue 17, pp. 175002 - 175002
Here, we report orbital-free density-functional theory (OF DFT) molecular dynamics simulations of the dynamic ion structure factor of warm solid density... 
RAY THOMSON SCATTERING | AUGMENTED-WAVE METHOD | MATTER | PRESSURE | HYDROGEN | MOLECULAR-DYNAMICS | METALLIZATION | PHYSICS, MULTIDISCIPLINARY | ION ENERGY RELAXATION | LIQUID-METALS | PLASMAS
Journal Article
by Zhang, YR and Zhao, ZZ and Xue, C and Gao, F and Wang, YN
JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN 0022-3727, 07/2019, Volume 52, Issue 29
A hybrid model, which consists of a fluid module, a sheath module and an ion Monte Carlo module, is employed to investigate the dependence of ion energy and... 
OXYGEN | PHYSICS, APPLIED | RADIO-FREQUENCY DISCHARGES | experimental validation | ion energy distribution | ion angular distribution | TRAVELING-WAVE DRIVEN | hybrid simulation | inductively coupled plasma | SHEATH | ARGON
Journal Article
Physical Review Letters, ISSN 0031-9007, 06/2016, Volume 116, Issue 23, pp. 233003 - 233003
We theoretically investigate the dynamics of a trapped ion immersed in a spatially localized buffer gas. For a homogeneous buffer gas, the ion's energy... 
STORED IONS | TEMPERATURE | SPECTROSCOPY | PHYSICS, MULTIDISCIPLINARY | DYNAMICS | SPECTROMETRY | COLLISIONS | MOLECULES | Dynamic tests | Cooling | Mathematical analysis | Cooling effects | Multipoles | Mathematical models | Buffers | Ion energy distribution | Physics - Atomic Physics
Journal Article
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