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Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 1/2015, Volume 14, Issue 1, pp. 013503 - 013503
A small but diverse set of test patterns is essential for the optimization of lithography parameters. We selectively extract the complicated patterns that are... 
pattern classification | pattern extraction | hotspot library | lithography test pattern | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2014, Volume 9053
Conference Proceeding
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, ISSN 0278-0070, 02/2020, Volume 39, Issue 2, pp. 520 - 532
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 12/2012, Volume 22, Issue 12, pp. 125002 - 9
Journal Article
Electronics and Communications in Japan, ISSN 1942-9533, 02/2015, Volume 98, Issue 2, pp. 43 - 51
Journal Article
2019 China Semiconductor Technology International Conference (CSTIC), 03/2019, pp. 1 - 3
Comprehensive test patterns are crucial to the development of new semiconductor technology. They play a key role in lithography such as source optimization,... 
OPC | SMO | test patterns | lithography
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2008, Volume 6924
Conference Proceeding
Engineering in Life Sciences, ISSN 1618-0240, 09/2016, Volume 16, Issue 6, pp. 525 - 531
Lateral flow immunoassays (LFIA), where a protein–protein interaction can be monitored on a test strip by a color reaction, are of high interest in the field... 
Protein pattern | Enzyme pattern | Directed immobilization | Paper‐based assay | Cellulose filter | Paper-based assay | BIOTECHNOLOGY & APPLIED MICROBIOLOGY | HUMAN CHORIONIC-GONADOTROPIN
Journal Article
Scripta Materialia, ISSN 1359-6462, 2004, Volume 50, Issue 1, pp. 105 - 109
Line patterns were machined on Si(1 0 0) surface using the combination of mechanical machining by Nanoindenter ® XP and KOH wet etching. A masking effort... 
Semiconductors | Lithography | Scratch test | Nanoindentation | IMPRINT LITHOGRAPHY | SCANNING TUNNELING MICROSCOPE | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | SILICON | nanoindentation | AIR | lithography | semiconductors | KINETICS | GROWTH | PROBE OXIDATION | scratch test
Journal Article
Scripta Materialia, ISSN 1359-6462, 2005, Volume 52, Issue 2, pp. 117 - 122
Line patterns were machined on borosilicate (Pyrex 7740 glass) surface using the combination of mechanical machining by Nanoindenter ® XP and HF wet etching,... 
Lithography | Nano-scratch test | Silicate | IMPRINT | silicate | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | SILICON | NANOSCIENCE & NANOTECHNOLOGY | lithography | nano-scratch test
Journal Article
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, ISSN 0278-0070, 09/2008, Volume 27, Issue 9, pp. 1657 - 1669
Journal Article
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