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CIRP Annals - Manufacturing Technology, ISSN 0007-8506, 2013, Volume 62, Issue 2, pp. 731 - 750
This paper reviews the design, engineering principles and applications of machine tools specially developed for large parts. Large workshop machines are... 
Machine tool | Calibration | Portable machine | SHAPE OPTIMIZATION | SYSTEM | DESIGN | COMPENSATION | PARALLEL KINEMATICS | PRECISION | ERROR | ENGINEERING, MANUFACTURING | ENGINEERING, INDUSTRIAL | GRINDING MACHINE | FINITE-ELEMENT-ANALYSIS | Amplification | Energy use | Workshops | Portability | Machine tools | Trends | Assembly
Journal Article
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, ISSN 0954-4054, 09/2018, Volume 232, Issue 11, pp. 1893 - 1902
Journal Article
Measurement Science and Technology, ISSN 0957-0233, 03/2018, Volume 29, Issue 5, p. 54004
Precision replication of the diamond tool cutting edge is required for non-destructive tool metrology. This paper presents an ultra-precision tool... 
replication | single point diamond tool | nanoindentation | cutting edge sharpness | measurement | WAFER | SERVO | MICRO-LENS ARRAY | METROLOGY | INSTRUMENTS & INSTRUMENTATION | RADIUS | ENGINEERING, MULTIDISCIPLINARY | FORCE MICROSCOPY | SURFACE | FABRICATION
Journal Article
Medical Physics, ISSN 0094-2405, 03/2011, Volume 38, Issue 3, pp. 1313 - 1338
Intensity modulated radiation therapy (IMRT) poses a number of challenges for properly measuring commissioning data and quality assurance (QA) radiation dose... 
radiotherapy | metrology | dosimetry | quality assurance | radiation therapy | intensity modulated radiation therapy | Medical imaging | Radiation detectors | Gels | particle detectors | Medical treatment planning | Photons | Calibration | Ionization chambers | Dose‐volume analysis | Radiography | Particle beam detectors | Therapeutic applications, including brachytherapy | dosimeters | Dosimetry/exposure assessment | MODULATED RADIATION-THERAPY | PRECISION GEL DOSIMETRY | IONIZATION-CHAMBER DOSIMETRY | ROUTINE QUALITY-ASSURANCE | CVD DIAMOND DETECTORS | XR TYPE-T | MONITOR UNIT CALCULATION | RADIOLOGY, NUCLEAR MEDICINE & MEDICAL IMAGING | 3-DIMENSIONAL DOSE VERIFICATION | RADIOGRAPHIC FILM CALIBRATION | DYNAMIC MULTILEAF COLLIMATOR | Radiotherapy Dosage | Radiotherapy, Intensity-Modulated - standards | Humans | Radiotherapy, Intensity-Modulated - methods | Radiometry - methods | Phantoms, Imaging | Radiotherapy, Intensity-Modulated - instrumentation | Quality Control | INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY | CALIBRATION | SPATIAL RESOLUTION | QUALITY ASSURANCE | RADIATION PROTECTION AND DOSIMETRY | EVALUATION | QUALITY CONTROL | RADIATION DOSES | ALGORITHMS | 60 APPLIED LIFE SCIENCES | DOSEMETERS | RADIATION DETECTORS | FILMS | RADIOLOGY AND NUCLEAR MEDICINE | PHANTOMS | RADIOTHERAPY | DOSIMETRY | VERIFICATION
Journal Article
2012, ISBN 9814397946, xii, 450
Book
Measurement, ISSN 0263-2241, 10/2018, Volume 127, pp. 588 - 595
Journal Article
Optics Letters, ISSN 0146-9592, 10/2013, Volume 38, Issue 20, pp. 4100 - 4103
A method for polarization metrology based on the conical refraction (CR) phenomenon, occurring in biaxial crystals, is reported. CR transforms an input... 
STOKES POLARIMETER | DIFFRACTION | OPTIMIZATION | VARIABLE RETARDERS | OPTICS | Design engineering | Polarization | Polarimeters | Gaussian beams (optics) | Refraction | Crystals | Metrology | Mathematical models
Journal Article
IEEE/ASME Transactions on Mechatronics, ISSN 1083-4435, 10/2017, Volume 22, Issue 5, pp. 2342 - 2350
The tracking interferometer, or the laser tracker, is a laser interferometer with a steering mechanism to change the laser beam direction to automatically... 
Mechatronics | Five-axis machine tools | machine tools | Nickel | metrology | tracking interferometer | IEEE transactions | volumetric accuracy | Steering mechanisms | Positioning devices (machinery) | Position measurement | Axes (reference lines) | Laser beams | Lasers
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 03/2011, Volume 7971, Issue 1, pp. 79710B - 79710B-17
Photoresist shrinkage is an important systematic uncertainty source in critical dimension-scanning electron microscope (CD-SEM) metrology of lithographic... 
ArF | immersion | photoresist | 193nm | CD-SEM | EUV | metrology | slimming | iArF | shrinkage | matching | Matching | Cadmium | Uncertainty | Metrology | Tools | Photoresists | Shrinkage | Sampling
Conference Proceeding
CIRP Annals - Manufacturing Technology, ISSN 0007-8506, 2010, Volume 59, Issue 1, pp. 425 - 428
This paper presents a new – stage concept for precision machine tools. A large work area (300 mm × 300 mm) is achieved using a T-type gantry arrangement, which... 
Metrology | Conceptual design | Control | ENGINEERING, MANUFACTURING | ENGINEERING, INDUSTRIAL | Gas bearings | Vibration damping | Multivariable control | Actuation | Air bearings | Stability analysis | Budgeting | Machine tools
Journal Article
International Journal of Machine Tools and Manufacture, ISSN 0890-6955, 2012, Volume 53, Issue 1, pp. 160 - 169
Journal Article
New Journal of Physics, ISSN 1367-2630, 07/2013, Volume 15, Issue 7, pp. 73043 - 30
Quantum metrology offers enhanced performance in experiments on topics such as gravitational wave-detection, magnetometry or atomic clock frequency... 
STATES | PARAMETER-ESTIMATION | SPECTROSCOPY | PHYSICS, MULTIDISCIPLINARY | ENTANGLEMENT | INTERFEROMETRY | LIMIT | CHANNELS | ENHANCED METROLOGY | LOGIC | Hierarchies | Compressing | Asymptotic properties | Metrology | Constants | Mathematical models | Calibration | Tuning | Physics - Quantum Physics
Journal Article