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Journal of Microelectromechanical Systems, ISSN 1057-7157, 02/2016, Volume 25, Issue 1, pp. 227 - 235
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 09/2016, Volume 26, Issue 10, p. 105016
This paper presents the design, fabrication and tests of a micro-fabricated MEMS 'Chladni' plate resonator. The proposed MEMS resonator has a square plate... 
micro plates | Chladni plates | electrostatic actuation | electrostatic detection | transverse plate vibrations | micro-electromechanical systems (MEMS) | MEMS resonators | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | NANOSCIENCE & NANOTECHNOLOGY | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
IEEE Transactions on Antennas and Propagation, ISSN 0018-926X, 02/2006, Volume 54, Issue 2, pp. 455 - 463
Journal Article
IEEE Transactions on Instrumentation and Measurement, ISSN 0018-9456, 02/2020, Volume 69, Issue 2, pp. 488 - 500
In electrostatic comb drive-based sensors and actuators, often there is a possibility of nonparallel motion or bending in individual comb which considerably... 
Micromechanical devices | Fabrication | Analytical models | electrostatic actuation | Beam bending | micro-electromechanical system (MEMS) | single mask process | Boundary conditions | Mathematical model | comb drive actuator | Springs | Electrostatics
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 12/2018, Volume 66, Issue 12, pp. 5708 - 5723
Journal Article
IEEE Sensors Journal, ISSN 1530-437X, 05/2016, Volume 16, Issue 10, pp. 3480 - 3481
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 09/2017, Volume 64, Issue 9, pp. 3829 - 3835
Journal Article
Measurement, ISSN 0263-2241, 2009, Volume 42, Issue 5, pp. 790 - 795
Researchers have been looking for alternatives of expensive conventional accelerometers in vibration measurements. Micro-ElectroMechanical Systems (MEMS)... 
Condition monitoring | Micro-ElectroMechanical System (MEMS) accelerometer | Vibration measurements | Frequency response function | INSTRUMENTS & INSTRUMENTATION | ENGINEERING, MULTIDISCIPLINARY | Microelectromechanical systems | Vibration | Mechanical engineering | Analysis
Journal Article
IEEE Transactions on Nuclear Science, ISSN 0018-9499, 09/2019, Volume 66, Issue 9, pp. 2055 - 2062
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 09/2015, Volume 62, Issue 9, pp. 3034 - 3041
This paper presents a transverse mode suppression theory and its experimental verification through aluminum nitride Lamb wave resonators (LWRs) operating at... 
Electrodes | Aluminum nitride (AlN) | Resonant frequency | Apertures | Cavity resonators | III-V semiconductor materials | Lamb wave resonator (LWR) | micro electromechanical system (MEMS) | Aluminum nitride | Acoustic waves | spurious mode suppression | PHYSICS, APPLIED | ENGINEERING, ELECTRICAL & ELECTRONIC | Resonance | Research | Resonators | Analysis
Journal Article
IEEE Transactions on Magnetics, ISSN 0018-9464, 04/2017, Volume 53, Issue 4, pp. 1 - 5
Journal Article
SMART MATERIALS AND STRUCTURES, ISSN 0964-1726, 06/2019, Volume 28, Issue 6, p. 65022
Low frequency piezoelectric P(VDF-TrFE) micro-cantilever vibration sensors have been developed for the first time with a novel MEMS process. Design and... 
THIN-FILMS | micro-cantilevers | INSTRUMENTS & INSTRUMENTATION | P(VDF-TrFE) co-polymer | MATERIALS SCIENCE, MULTIDISCIPLINARY | micro-electromechanical systems (MEMS) | POWER | SKIN | energy harvesters | piezoelectric | vibration sensors | FLUORIDE
Journal Article
Jixie Qiangdu/Journal of Mechanical Strength, ISSN 1001-9669, 08/2018, Volume 40, Issue 4, pp. 857 - 862
Journal Article
Journal Article
Optik - International Journal for Light and Electron Optics, ISSN 0030-4026, 01/2014, Volume 125, Issue 1, pp. 101 - 103
This paper reports the design and analysis of a novel helix antenna based on Micro-electromechanical Systems (MEMS) technology, which is used in terahertz... 
Terahertz (THz) applications | Helix antenna | Micro-electromechanical Systems (MEMS) | OPTICS | Microelectromechanical systems | Waveguides | Antennas (Electronics) | Design engineering | Circuits | Wafers | Coplanar waveguides | Antennas | Optimization | Technology utilization
Journal Article
Advanced Functional Materials, ISSN 1616-301X, 03/2012, Volume 22, Issue 6, pp. 1222 - 1228
Journal Article
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