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2018 24th International Conference on Automation and Computing (ICAC), 09/2018, pp. 1 - 5
More and more nanoelectronics, high density data storage devices, nanophotonics, scaffolds in bioengineering for cell proliferation applications demands on... 
nanofabrication | nanostructure | Oxidation | Nanoscale devices | Silicon | Plastics | Probes | Substrates | Surface treatment | scanning probe lithography
Conference Proceeding
IEEE Transactions on Electron Devices, ISSN 0018-9383, 07/2006, Volume 53, Issue 7, pp. 1509 - 1516
In this paper, atomic layer deposition (ALD) and ultraviolet ozone oxidation (UVO) of zirconium and hafnium oxides are investigated for high-kappa dielectric... 
Zirconium compounds | surface passivation | MOS capacitors | high-permittivity dielectric | hafnium oxide | Germanium | Oxidation | Materials processing | Hafnium compounds | Leakage currents | zirconium oxide | MOS devices | Metal oxide semiconductors | Equivalence | Nanocomposites | Nanomaterials | Nanostructure | Dielectrics | Deposition
Journal Article
Nanotechnology, ISSN 0957-4484, 03/2017, Volume 28, Issue 14, p. 142003
Journal Article
Journal of the Electrochemical Society, ISSN 0013-4651, 2004, Volume 151, Issue 10, pp. G679 - G682
Silicon nanowire fabrication of nanoscale dimensions on a single-crystal silicon surface by scanning probe lithography (SPL) and potassium hydroxide (KOH)... 
ELECTROCHEMISTRY | PROBE OXIDATION | MATERIALS SCIENCE, COATINGS & FILMS | ATOMIC-FORCE MICROSCOPE
Journal Article
Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005, ISSN 0160-8371, 2005, pp. 991 - 995
A new technique has been invented and developed at the ANU for the manufacture of thin (<60 /spl mu/m) highly efficient single crystalline solar cells. Novel... 
Photovoltaic systems | Strips | Costs | Photovoltaic cells | Crystallization | Silicon | Oxidation | Etching | Manufacturing | Solar power generation
Conference Proceeding
Journal Article
Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 7/2013, Volume 12, Issue 3, pp. 031111 - 031111
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 09/2001, Volume 48, Issue 9, pp. 2016 - 2021
Graded gate oxide process involves a two-step synthesis of growing an oxide at a temperature above the viscoelastic temperature (T/sub VE/) onto a pregrown low... 
Oxidation
Journal Article
IEEE Transactions on Plasma Science, ISSN 0093-3813, 08/2004, Volume 32, Issue 4, pp. 1747 - 1751
A drastic reduction of the growth temperature of oxynitride (SiON) films, which are usually grown around 1000/spl deg/C, is realized by using a... 
Plasma properties | Insulation | Plasma applications | Semiconductor films | Tunneling | Silicon | Oxidation | Plasma devices | Plasma temperature | Substrates
Journal Article
IEEE Electron Device Letters, ISSN 0741-3106, 09/2001, Volume 22, Issue 9, pp. 423 - 425
Journal Article
IEEE Journal of Selected Topics in Quantum Electronics, ISSN 1077-260X, 04/1997, Volume 3, Issue 2, pp. 359 - 365
We report on 64/spl deg/C continuous-wave (CW) operation of a 1.5-/spl mu/m vertical-cavity laser. This laser consists of two fused AlGaAs-GaAs mirrors with a... 
Temperature | Semiconductor lasers | Heating | Oxidation | Optical fiber communication | Mirrors | Vertical cavity surface emitting lasers | Laser fusion | Fiber lasers | Optical pulses
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 01/2002, Volume 49, Issue 1, pp. 179 - 181
The leakage current of an anodic oxide (ANO) is two orders lower than that of a rapid thermal oxide (RTO) due to the negative oxide trapped charges near the... 
Dielectric films | Anodic oxide (ANO) | Rapid thermal oxide (RTO) | TRANSISTORS | PHYSICS, APPLIED | rapid thermal oxide (RTO) | NITRIDE-GATE | anodic oxide (ANO) | ENGINEERING, ELECTRICAL & ELECTRONIC | Leakage | Anodic | Annealing | Anodizing | Oxides | Leakage current | Devices | Gates
Journal Article
Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005, ISSN 1930-8876, 2005, pp. 81 - 84
We study the coupling effects in multiple gate SOI devices with Omega configuration, metal gate and HfO/sub 2/ dielectric. Electrical measurements together... 
Silicon on insulator technology | Hafnium oxide | FinFETs | Numerical simulation | Threshold voltage | Etching | Oxidation | Chemical vapor deposition | FETs | Immune system
Conference Proceeding
IEEE Transactions on Magnetics, ISSN 0018-9464, 07/2001, Volume 37, Issue 4, pp. 2531 - 2533
Sm/sub 2/(Co,Fe,Cu,Zr)/sub 17/ type magnets are unique high energy product magnet materials for applications at temperatures higher than 200/spl deg/C. These... 
Temperature | Zirconium | Magnetic materials | Iron | Oxidation | Samarium | Magnetic losses | Coatings | Magnets | Electrons
Journal Article
IEEE Transactions on Semiconductor Manufacturing, ISSN 0894-6507, 05/2003, Volume 16, Issue 2, pp. 147 - 154
Feasibility of single-wafer rapid-thermal process as an alternative to the conventional batch-type furnace process is evaluated on a 0.15-/spl mu/m 128-Mb mask... 
Fabrication | Temperature distribution | Rapid thermal processing | Costs | Manufacturing processes | Furnaces | Production | Oxidation | Read only memory | Substrates
Journal Article
IEEE Electron Device Letters, ISSN 0741-3106, 07/2000, Volume 21, Issue 7, pp. 341 - 343
Electrical and reliability properties of ultrathin La 2 O 3 gate dielectric have been investigated. The measured capacitance of 33 /spl Aring/ La 2 O 3 gate... 
Temperature | Current measurement | Dielectric materials | Dielectric measurements | Electric variables | Capacitance | Leakage current | Oxidation | Thermal stability | Thickness measurement
Journal Article
IEEE Transactions on Magnetics, ISSN 0018-9464, 09/2000, Volume 36, Issue 5, pp. 3291 - 3293
Investigation of thermal stability at 300-550/spl deg/C for the newly developed Sm(Co/sub w/Fe/sub v/Cu/sub x/Zr/sub y/)/sub z/ high temperature magnets is... 
Temperature | Zirconium | Oxidation | Iron | Ceramics | Magnetic losses | Coatings | Magnets | Thermal stability | Demagnetization
Journal Article
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