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physica status solidi (RRL) – Rapid Research Letters, ISSN 1862-6254, 01/2018, Volume 12, Issue 1, pp. 1700320 - n/a
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 06/2017, Volume 27, Issue 8, p. 85003
Wet bulk micromachining is a popular technique for the fabrication of microstructures in research labs as well as in industry. However, increasing the... 
MEMS | wet bulk micromachining | KOH | wet anisotropic etching | TMAH | ALKALINE-SOLUTIONS | PHYSICS, APPLIED | HYDROXYLAMINE | BEHAVIOR | NANOSCIENCE & NANOTECHNOLOGY | SILICON SUBSTRATE | ENGINEERING, ELECTRICAL & ELECTRONIC | MICROSTRUCTURES | SMOOTH SURFACE | KOH SOLUTION | INSTRUMENTS & INSTRUMENTATION | ORIENTATION | CONVEX CORNERS | WATER SOLUTION | NH2OH
Journal Article
Nanotechnology, ISSN 0957-4484, 05/2018, Volume 29, Issue 28, p. 28LT01
Fabrication of a 2D square lattice array of intentionally tapered micro-/nano-silicon pillars by metal-assisted chemical etching (MACE) of silicon wafers is... 
silicon nanowire | metal-assisted chemical etching | nanoimprint | anisotropic wet etching | IMPRINT LITHOGRAPHY | PHYSICS, APPLIED | KOH | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | CRYSTALLINE SILICON | HIGH-ASPECT-RATIO | NANOIMPRINT LITHOGRAPHY | PROFILE | AREA | SURFACE | NANOWIRES
Journal Article
Journal of Physics-Condensed Matter, ISSN 0953-8984, 2016, Volume 28, Issue 9, p. 094014
The ability to selectively chemically functionalize silicon nitride (Si3N4) or silicon dioxide (SiO2) surfaces after cleaning would open interesting... 
functionalization | HF-etching | THIN-FILMS | Si3N4 | PHYSICS, CONDENSED MATTER | SELF-ASSEMBLED MONOLAYERS | ACID | MECHANISM | WET | LOW HYDROGEN CONTENT | SI SURFACES | VAPOR-DEPOSITION | LIQUID METHANOL | SiN
Journal Article
Sensors & Actuators: A. Physical, ISSN 0924-4247, 2008, Volume 143, Issue 1, pp. 154 - 161
Journal Article
Materials Letters, ISSN 0167-577X, 12/2016, Volume 184, pp. 173 - 176
SrMoO is a perovskite oxide material with very high electrical conductivity, exhibiting great potential for integration into electronic devices. Here, we... 
Thin films | SrMoO3 | Electronic materials | Wet chemical etching | Molybdate | SrMoO | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | Strontium | Electric potential | Electrical resistivity | Oxides | Oxidation | Etching | Molybdates
Journal Article
ACS Applied Materials and Interfaces, ISSN 1944-8244, 10/2014, Volume 6, Issue 19, pp. 16782 - 16791
In this work, a novel wet silicon (Si) etching method, electric bias-attenuated metal-assisted chemical etching (EMaCE), is demonstrated to be readily... 
wet etching | 3D microstructures | electrical bias | TRENCHES | THROUGH-SILICON | SI NANOWIRES | KINETICS | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | NANOWIRE ARRAYS | CATALYSTS
Journal Article
ACS APPLIED MATERIALS & INTERFACES, ISSN 1944-8244, 08/2018, Volume 10, Issue 32, pp. 27488 - 27497
The ternary III-V semiconductor compound, AlxGa1-xAs, is an important material that serves a central role within a variety of nanoelectronic, optoelectronic,... 
metal-assisted chemical etching | INGAP/GAAS HBTS | MATERIALS SCIENCE, MULTIDISCIPLINARY | WET | AlGaAs | NANOSCIENCE & NANOTECHNOLOGY | NANOSTRUCTURES | CATALYST | MASS-TRANSPORT | I-MacEtch | GAAS | DAMAGE | POROUS SILICON | nanopillar | SI NANOWIRES | FABRICATION
Journal Article
physica status solidi (b), ISSN 0370-1972, 08/2017, Volume 254, Issue 8, p. n/a
An epitaxial lift-off (ELO) process for GaN materials has been demonstrated using bandgap-selective photoenhanced wet etching of an InGaN release layer. This... 
layer transfer | bandgap‐selective | photoelectrochemical wet etching | GaN | epitaxial lift‐off | chemical lift‐off | epitaxial lift-off | chemical lift-off | bandgap-selective | PHYSICS, CONDENSED MATTER | FILMS | LASER-DIODES | POWER | FABRICATION | Chemical vapor deposition | Epitaxy | Liquors
Journal Article
Surface Science, ISSN 0039-6028, 2009, Volume 603, Issue 10, pp. 1904 - 1911
Journal Article
Chemical Physics Letters, ISSN 0009-2614, 10/2018, Volume 710, pp. 54 - 58
GaN surface can be effectively and efficiently etched by organic electrolyte under the prerequisite of UV light and electric field. From the point of... 
Wet etching | Organic electrolyte | Semiconductor | Gallium nitride | Surface structure | VAPOR-PHASE EPITAXY | N-TYPE | FILMS | GAN | PHYSICS, ATOMIC, MOLECULAR & CHEMICAL | CHEMISTRY, PHYSICAL | FABRICATION | Nitrides | Electrolytes | Gallium nitrate | Electric fields
Journal Article
Journal of nanoscience and nanotechnology, ISSN 1533-4880, 03/2019, Volume 19, Issue 3, pp. 1749 - 1754
Journal Article
NANOSCALE, ISSN 2040-3364, 04/2019, Volume 11, Issue 16, pp. 7967 - 7975
Nanowire (NW) based devices for solar driven artificial photosynthesis have gained increasing interest in recent years due to the intrinsically high surface to... 
HETEROEPITAXIAL GAN | PHYSICS, APPLIED | PHOTOLUMINESCENCE | LUMINESCENCE | MATERIALS SCIENCE, MULTIDISCIPLINARY | WET | GROWTH | NANOSCIENCE & NANOTECHNOLOGY | CHEMISTRY, MULTIDISCIPLINARY | TIO2
Journal Article
Applied Surface Science, ISSN 0169-4332, 2008, Volume 254, Issue 9, pp. 2671 - 2677
This paper studies the wet etching behavior of AZO (ZnO:Al) transparent conducting film with tetramethylammonium hydroxide (TMAH). The optimum optoelectronic... 
AZO film | Transparent conducting film | Wet etching | Chemical stability | THIN-FILMS | CONTACTS | PHYSICS, CONDENSED MATTER | transparent conducting film | chemical stability | PHYSICS, APPLIED | wet etching | CHEMISTRY, PHYSICAL | ITO FILMS | MATERIALS SCIENCE, COATINGS & FILMS | Zinc oxide
Journal Article
Journal Article
Advanced Materials, ISSN 0935-9648, 08/2013, Volume 25, Issue 32, pp. 4470 - 4476
Spotlight on etching: (11‐22) semipolar GaN plane light‐emitting diodes (LEDs) are demonstrated using a wet‐etching process. A trigonal prism cell structure... 
wet etching | ohmic contacts | extraction efficiencies | semipolar GaN planes | light emitting diodes | CONTACTS | EMITTING-DIODES | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | BARRIERS | NANOSCIENCE & NANOTECHNOLOGY | LEDS | CHEMISTRY, MULTIDISCIPLINARY | EXTRACTION | NONPOLAR | Liquors
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 12/2014, Volume 24, Issue 12, p. 125001
Journal Article
Journal of Physics D: Applied Physics, ISSN 0022-3727, 09/2017, Volume 50, Issue 39, p. 395306
A model of wet chemical etching of tracks of swift heavy ions (SHI) decelerated in solids in the electronic stopping regime is presented. This model takes into... 
swift heavy ion | electronic stopping | Monte-Carlo | olivine | wet chemical etching | molecular dynamics | track | PHYSICS, APPLIED | NUCLEAR TRACKS | PARTICLE TRACKS | SOLIDS | DIFFUSION
Journal Article